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P. R. Westmoreland

P. R. Westmoreland

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Gas-Phase and Surface Chemistry in Electronic Materials Processing: Volume 334

NR

Gas-Phase and Surface Chemistry in Electronic Materials Processing: Volume 334

By: T. J. Mountziaris, G. R. Paz-Pujalt, F. T. J. Smith, P. R. Westmoreland

Publisher: Materials Research Society

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₹2,251

Binding:	Hardback
Release:	27 May 1994
Language:	English

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