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Advanced Nano Deposition Methods

Advanced Nano Deposition Methods

          
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About the Book

This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.

Table of Contents:
List of Contributors XIII 1 Pulsed Laser Deposition for Complex Oxide Thin Film and Nanostructure 1 Chunrui Ma and Chonglin Chen 1.1 Introduction 1 1.2 Pulsed Laser Deposition System Setup 2 1.3 Advantages and Disadvantages of Pulsed Laser Deposition 3 1.4 TheThermodynamics and Kinetics of Pulsed Laser Deposition 3 1.5 Monitoring of Growth Kinetics 8 1.6 Fundamental Parameters inThin Film Growth 10 1.7 Pulsed Laser Deposition for Complex Oxide Thin Film Growth 13 1.8 Pulsed Laser Deposition for Nanostructure Growth 23 1.9 Variation of Pulsed Laser Deposition 24 1.10 Conclusion 24 References 25 2 Electron Beam Evaporation Deposition 33 Zhongping Wang and Zengming Zhang 2.1 Introduction 33 2.2 Electron Beam Evaporation System 35 2.3 Characterization ofThin Film 45 2.4 Summary 53 Acknowledgments 53 References 53 3 Nanostructures and Thin Films Deposited with Sputtering 59 Weiqing Yang 3.1 Introduction 59 3.2 Nanostructures with Sputtering 60 3.3 Thin Films Deposited with Sputtering 71 3.4 Summary 76 Acknowledgments 77 References 77 4 Nanostructures and Quantum Dots Development with Molecular Beam Epitaxy 81 Wen Huang 4.1 Introduction 81 4.2 Technology of MBE 82 4.3 Nanoheterostructures Fabricated by Molecular Beam Epitaxy 91 4.4 Quantum Dots Development with Molecular Beam Epitaxy 101 4.5 Summary 103 Acknowledgments 104 References 104 5 Carbon Nanomaterials and 2D Layered Materials Development with Chemical Vapor Deposition 105 Taisong Pan 5.1 Introduction 105 5.2 Carbon Nanotube Synthesis by Chemical Vapor Deposition 106 5.3 Graphene Synthesis by Chemical Vapor Deposition 112 5.4 Metal Dichalcogenide Synthesis by Chemical Vapor Deposition 115 5.5 Summary 119 References 120 6 Nanostructures Development with Atomic Layer Deposition 123 Hulin Zhang 6.1 Introduction 123 6.2 Reaction Mechanisms 125 6.3 Nanostructures Based on ALD 131 6.4 Summary 136 Acknowledgments 137 References 138 7 Nanomaterial Development with Liquid-Phase Epitaxy 141 Weiqing Yang 7.1 Introduction 141 7.2 Hydrothermal Method 142 7.3 Nanostructures Fabricated Using LPE 147 7.4 Summary 156 Acknowledgments 156 References 156 8 Nanostructural Thin Film Development with Chemical Solution Deposition 159 Yanda Ji and Yuan Lin 8.1 Introduction 159 8.2 Precursor Solution Preparation 159 8.3 Coating 162 8.4 Thermal Treatment 163 8.5 Control of the Microstructures in Thin Films Prepared by CSD Techniques 164 8.6 Examples of NanostructuralThin Films Prepared by CSD Techniques 167 8.7 Summary 174 References 175 9 Nanomaterial Development Using In Situ Liquid Cell Transmission Electron Microscopy 179 Xin Chen,Wangfan Zhou, Debiao Xie, and Hongliang Cao 9.1 Introduction 179 9.2 The Technological Development of In Situ Liquid Cell TEM 179 9.3 Nanomaterial Development Using In Situ Liquid Cell TEM Technology 185 9.4 Summary and Outlook 191 Acknowledgments 191 References 192 10 Direct-Writing Nanolithography 195 Min Gao 10.1 Introduction 195 10.2 Electron Beam Lithography 195 10.3 Focused Ion Beam Lithography 198 10.4 Gas-Assisted Electron and Ion Beam Lithography 200 10.5 SPM Lithography 201 10.6 Dip-Pen Lithography 205 10.7 Summary 206 Acknowledgments 207 References 207 11 3D Printing of Nanostructures 209 Min Gao 11.1 Introduction 209 11.2 3D Printing Processes 209 11.3 Types of 3D Printing 210 11.4 3D Direct LaserWriting by Multiphoton Polymerization 214 11.5 3D Printing Applications 217 11.6 Summary 219 Acknowledgments 220 References 220 12 Nanostructured Thin Film Solid Oxide Fuel Cells 223 Alex Ignatiev, Rabi Ebrahim, Mukhtar Yeleuov, Daniel Fisher, Xin Chen, NaijuanWu, and Serekbol Tokmoldin 12.1 Introduction 223 12.2 Solid Oxide Fuel Cells 223 12.3 Summary 237 Acknowledgments 237 References 237 13 Nanostructured Magnetic Thin Films and Coatings 239 Goran Rasic 13.1 Introduction 239 13.2 High-Frequency Devices 240 13.3 Magnetic Information Storage Devices 251 13.4 Summary 261 Acknowledgments 261 References 262 14 Phase Change Materials for Memory Application 267 Liangcai Wu and Zhitang Song 14.1 Introduction 267 14.2 Ge2Sb2Te5 and Its Properties’ Improvement 268 14.3 High-Speed and Lower-Power TiSbTe Materials 277 14.4 Summary 283 Acknowledgments 283 References 283 15 Nanomaterials and Devices on Flexible Substrates 285 Hulin Zhang 15.1 Introduction 285 15.2 Nanomaterials on Flexible Substrates 286 15.3 Devices on Flexible Substrates 292 15.4 Summary 300 Acknowledgments 301 References 301 Index 305


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Product Details
  • ISBN-13: 9783527340255
  • Publisher: Wiley-VCH Verlag GmbH
  • Publisher Imprint: Blackwell Verlag GmbH
  • Height: 249 mm
  • No of Pages: 328
  • Spine Width: 20 mm
  • Width: 173 mm
  • ISBN-10: 3527340254
  • Publisher Date: 02 Nov 2016
  • Binding: Hardback
  • Language: English
  • Returnable: N
  • Weight: 839 gr


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