The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.

Table of Contents:
Preface Intrinsic/Internal Gettering in Czochralski Silicon Wafers Defects and impurities in Multi Layer Structures on Si: The Role of Mechanical Stresses in Gettering of Defects and Impurities by Intrinsic and Extrinsic Grain Boundaries Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate On the Role of Stacking Faults in Copper Precipitation in Silicon TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance Intrinsic Gettering in Nitrogen-Doped Cz-Si Application of Doped Polysilicon Layers in a BICMOS-Technology Self-Interstitial Atoms and Structure of Intrinsic Getter in Silicon Crystals Internal Gettering Effectiveness for Transition Metals /Fe,Ni/ in Cz-SI Intrinsic Gettering of Radiation Defects in Silicon Caused by High-Temperature Oxygen-Containing Defects Defect Engineering in Submicron CMOS Technologies Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below Point Defect Engineering for ULSI Silicide Processing Defect Control and Gettering in Cz-Silicon Silicon Device Engineering by Intrinsic Point Defect Control Defect Engineering in a High-Voltage Substrate Technology Thermal Wafer Warpage and its Avoidance Defects in Crystalline Silicon - History and Outlook Defect Spectroscopy in Compound Semiconductors Formation and Defect Structure of FeIn Pairs in Silicon EPR Identification of Mn- or Cr-Acceptor Pairs in Silicon The Influence of RTA on Deep States in Si-Implanted GaAs MESFET Structures Investigated by DLTS and ODLTS Study of Electron and Hole Emission from Deep States in Undoped Semi-Insulating GaAs by PICTS and Photo-DLTS 'New Donors' in Heat-Treated Cz-Si - What is Really New There? The Thermal Acceptor in Nitrogen Doped Cz Silicon On Carbon-Implantation Induced Donors in Silicon A Search on the Identity of the Ev+0.34 eV C-Related Defect in p-Si Simulation of Hydrogen Diffusion in n and p Type Silicon: Determination of Kinetic and Thermodynamic Parameters Hydrogen Passivation of Grain Boundaries in Polysilicon: Computer Simulation Modification of the Properties of Si Crystals Exposed to Atomic Hydrogen at High Temperatures Simulation of Point-Defect Assisted Diffusion of Boron in RTA-Treated Silicon Wafers Dopant Deactivation and Electrically Active Defects Induced in Silicon by CF4 and CBrF3 Plasma Etching Formation and Properties of Metastable Silicide Precipitates in Silicon Mechanical Behaviour of Semiconductors in Terms of Dislocation Dynamics Dislocation Kink Dynamics and Gettering Processes in Semiconductors Local Distribution of Structure Defects Induced by Microhardness Indentation in GaAs Dynamics of a Dislocation in the Potential Relief of Semiconductor Crystals under Varying Applied Forces Peculiarities of Dislocation Luminescence of Covalent Semiconductors Defects in Multicrystalline Silicon Origin of Recombination at Extended Defects: EBIC Contrast Experiments and Theory on Dislocations in GaAs Electrical Properties of Dislocation Impurity Atmospheres in Si Electrical Properties of Defects in Multicrystalline Silicon Process Induced Defects in TiSi2-N+/P-Structures Evolution of Process - Induced Defects in Silicon under Hydrostatic Pressure Evolution of Monoclinic SiAs Precipitates in Heavily As+ Implanted and Isothermally Annealed Silicon Defect Structures in Si Preamorphized Wafers Behavior of Implanted Nitrogen in Si with the Buried Layer of SiO2 Precipitates Interaction of Implanted into Silicon Fluorine with Radiation Defects Electrical Activity of Halogen-Silicon Complexes Radiation Defect-Induced Optical Absorption of GaP Synchrotron Radiation X-Ray Topography of Growth Striations in Magnetic-Field-Applied Czochralski Silicon Applications of In Situ Transmission Electron Microscopy to the Characterization of Process-Induced Defects TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP Defect Generation in Cz-Silicon Used for the Design of Synchrotron Monochromator Crystals X-Ray Diffractometry and Topography of CdHgTe Bulk Crystals and CdHgTe-CdTe Epitaxial Structures Grazing Incidence Diffraction X-Ray Topography Indirect Excitations in the X-Ray Standing Wave Method Double-Channel X-Ray Standing Wave Technique for Impurity Atom Location in Multicomponent Crystals Spectroscopical and Electrical Evidences about Segregation Effects in Semiconductors DLTS of High-Resistivity Si Evaluation of DLTS Measurements in the Case of "Broadened" Spectra or a Barrier Limited Capture Process B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements Nonlinear Recombination and Diffusion Processes in Si and GaAs Carrier Recombination Processes in PbTe Films by Picosecond IR Excitation Investigation on Electrical Contacts on N-Type Silicon Diagnostics of Defects from the Noise Spectra Statistical Analysis of the Assembly-Induced Degradation of the Silicon Device Parameters Mechanical Strain Relaxation during Lattice-Mismatched Epitaxial Growth Interfacial Dislocations in the GaSb/GaAs (001) Heterostructure Si/Ge - Heterostructures - Stability of Strained Layer Superlattices Distribution of Defects in InAs1-x-ySbxPy-InAs DHs Nature of Defects in MOCVD Grown GaAlAs-GaAs QW DHs XPS Sputter Depth Profiling Applid to the Analysis of Si/SiO2, Si/SiOxNy and Si/Si3N4 Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment Germanium and Antimony Epitaxy with Large Lattice Misfit TEM Investigations on the Structure and Stability of Diffusion Barriers for VLSI Contacts Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates SOI by Silicon Wafer Direct Bonding - Problems of Wafer Warpage and Surface Chemistry Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source Zinc and Zinc-Impurity Pairs in Silicon