Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications. The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject. The book covers additional topics such as: Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

Table of Contents:
About the Editor xv List of Contributors xvii Preface xxi About the Companion Website xxix 1 Multiphysics Simulations on the Effect of Fluidic Concentration Profiles Over Y-Channel and T-Channel Designs 1 Pavar Sai Kumar and Sanket Goel 1.1 Introduction 1 1.2 Real-Time Applications of This Study 2 1.3 Simulation Section 2 1.4 Results and Discussions 3 1.5 Conclusion 10 References 10 2 Droplet Generation in T-Junction Microchannel Using Multiphysics Software 13 Abhishek Kumar and Sanket Goel 2.1 Introduction 13 2.2 Simulation Section 15 2.3 Result and Discussion 17 2.4 Conclusion 17 References 18 3 Cleanroom-Assisted and Cleanroom-Free Photolithography 21 Abhishesh Pal, Satish Kumar Dubey, and Sanket Goel 3.1 Introduction 21 3.2 Photolithography Basics, Classification and Applications 22 3.3 Experimental Section on Designing and Development of Features Using Photolithography 25 3.4 Conclusion 26 References 27 4 Additive Manufacturing (3D Printing) 29 Pavar Sai Kumar, Abhishek Kumar, and Sanket Goel 4.1 Stereolithography (SLA) Printing of Y-Channeled Microfluidic Chip 29 4.2 Fused Deposition Modeling (FDM): Fabrication of Single Electrode Electrochemiluminescence Device 34 References 37 5 Laser Processing 41 Pavar Sai Kumar, Abhishek Kumar, Manish Bhaiyya, and Sanket Goel 5.1 CO 2 Laser for Electrochemical Sensor Fabrication 41 5.2 One-Step Production of Reduced Graphene Oxide from Paper via 450 nm Laser Ablations 45 5.3 Conclusion 50 References 50 6 Soft Lithography: DLW-Based Microfluidic Device Fabrication 53 K. Ramya and Sanket Goel 6.1 Introduction 53 6.2 Designing Section 54 6.3 Conclusion 57 References 57 7 Electrode Fabrication Techniques 59 Sanjeet Kumar, Abhishek Kumar, K.S. Deepak, Manish Bhaiyya, Aniket Balapure, Satish Kumar Dubey, and Sanket Goel 7.1 Inkjet Printing Technique: Electrode Fabrication for Advanced Applications 59 7.2 Screen Printing Technique for Electrochemical Sensor Fabrication 62 7.3 Physical Vapor Deposition (PVD) Technique for Electrode Fabrication 66 7.4 Conclusion 69 References 69 8 Morphological Characterization 71 Dhoni Nagaraj, Yuvraj Maphrio Mao, Parvathy Nair, Sanjeet Kumar, Imran Khan, Amreen Khairunnisa, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel 8.1 Morphological Studies with Different Techniques 71 8.2 Scanning Electron Microscopy 71 8.3 Steps Involved in the Scanning Electron Microscope Characterization 72 8.4 X-Ray Diffraction (XRD) 74 8.5 Optical LED Microscope 79 8.6 Contact Angle 83 References 87 9 Spectroscopic Characterization 89 Himanshi Awasthi, N.K. Nishchitha, Sonal Fande, and Sanket Goel 9.1 Introduction 89 9.2 Ultraviolet-Visible (UV-Vis) Spectrophotometers 90 9.3 X-Ray Photoelectron Spectroscopy (XPS) 92 9.4 Raman Spectroscopy 97 9.5 Fourier Transform Infrared (FTIR) Spectroscopy 100 References 104 10 Microfluidic Devices 105 Abhishesh Pal, Pavar Sai Kumar, Sreerama Amrutha Lahari, Sonal Fande, Abhishek Kumar, Manish Bhaiyya, Sohan Dudala, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel 10.1 Electrochemical Detection of Bacteria, Biomarkers, Biochemical, and Environmental Pollutants 105 10.2 Microfluidics Integrated Electrochemiluminescence System for Hydrogen Peroxide Detection 114 10.3 Development of Microfluidic Chip for Colorimetric Analysis 118 10.4 Development of Disposable and Eco-Friendly μPADs as Chemiluminescence Substrates 123 10.5 Microfluidic Devices for Polymerase Chain Reaction (PCR) 128 References 131 11 Wearable Devices 135 Ramya Priya Pujari, S. Vanmathi, Satish Kumar Dubey, and Sanket Goel 11.1 Application of Laser-Induced Graphene in Breath Analysis 135 11.2 Wearable Microfluidic Device for Nucleic Acid Amplification 138 11.3 Wearable Patch Biofuel Cell 142 References 145 12 Energy Devices 147 Himanshi Awasthi, S. Vanmathi, and Sanket Goel 12.1 Introduction 147 12.2 Enzymatic Biofuel Cells and Microbial Fuel Cells 150 12.3 Microbial Fuel Cells (MFCs) 153 12.4 Electrochemical Characterization of Supercapacitor Energy Devices 156 References 160 13 Conclusion and Future Outlook 163 Amreen Khairunnisa Index 165