Foundations of MEMS

Foundations of MEMS

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About the Book
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.

 

 

Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology – all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking. 
Book Details
ISBN-13: 9780131472860
Publisher: Prentice Hall
Binding: Paperback
Height: 231.75 mm
No of Pages: 530
Spine Width: 27.25 mm
Width: 187 mm
ISBN-10: 0131472860
Publisher Date: 01 Aug 2005
Edition: 1
Language: English
Series Title: English
Weight: 939.78 gr
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