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Thomas J. Shaffner

Thomas J. Shaffner

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Characterization and Metrology for ULSI Technology 2003

Characterization and Metrology for ULSI Technology 2003

By: David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Stefan Zollner, Rajinder P. Khosla

Publisher: American Institute of Physics

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₹13,953

Binding:	Hardback
Release:	08 Oct 2003
Language:	English

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2.

Characterization and Metrology for ULSI Technology 2000

NR

Characterization and Metrology for ULSI Technology 2000

By: Patrick J. Smith, David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, W. Murray Bullis

Publisher: American Institute of Physics

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₹16,609

Binding:	SA
Release:	01 Mar 2001
Language:	English

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